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It is a device that remove the pellicle from the photomask by warming the mask adhesive of the pellicle and the unique mechanism. Removing recipe is made according to the manufacturer and the mask adhesive etc. It is possible to remove the pellicle without putting a strain in the photomask. |
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| Product Name | Pellicle Remover M777 |
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| Model Number | M777 |
| Dimension | 700mmW*550mmD*650mmH |
| Weight | approx. 90kg |
| Object work size | |
| Size of mask | 6″ |
| Size of Pellicle | 105mm～134mm |
| θaxis stroke | 0°～±5° |
| Z axis stroke | 34.44mm（fixation） |
| Heater specification | Ceramic Clean heater |
| Utility | Power supply: AC100V, 10A, 50/60Hz |
| ※ The pellicle is assumed to be the one to meet the following equirement. |
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| jig position: 2.3mm from central distribution 104mm pitch and mask bonding side. jig diameter: Φ1.6mm |