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Pellicle Remover M777
It is a device that remove the pellicle from the photomask by warming the mask adhesive of the pellicle and th …
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Pellicle Mounter System / M515KS
A clean robot transfers Mask and Pellicle from each cassette to Mounting device, and mounting Pellicle …
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FPD Pellicle Mounter M515L-Ⅲ
This FPD Pellicle Mounter pelliclizes FPD mask and Pellicle by the definite condition (press time , pre …
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Semi Auto Pellicle Mounter / M515KA
After setting mask to the mask stage by handling jig. Pellicle is mounted to mask by preset condition (press t …
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Mask Load Unload System M695, M758
The clean robot transfers mask between various kind of cases such as mask case, NSR case, FPA case, PD case, S …
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Mask Handler M726
The mask set on the stage turn around by 90degrees steps and Up and Down and Reverse automatically. Pro …
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