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After setting mask to the mask stage by handling jig. Pellicle is mounted to mask by preset condition (press time / press weight) . |
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| Product Name | Semi Auto Pellicle Mounter |
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| Model Number | M515KA |
| Weight | approx. 180kg |
| Pelliclizing Pressure | 0.035～0.4kN |
| Pellicleizing time | 0-999 sec. |
| pellclization Precision | <=±0.2mm |
| 対応ペリクル | 短辺 : 109～124mm 長辺 : 147～150mm 高さ : 2.90～6.3mm 治具穴ピッチ : 104mm |
| マスク品種 | 6025マスク |